面陣列芯片封裝設(shè)備中的視覺定位技術(shù).pdf

1、華中科技大學(xué)碩士學(xué)位論文面陣列芯片封裝設(shè)備中的視覺定位技術(shù)姓名：王立成申請(qǐng)學(xué)位級(jí)別：碩士專業(yè)：機(jī)械電子工程指導(dǎo)教師：熊有倫丁漢20040718IIAbstractWiththedevelopmentofmicroelectronictechnologythetechnologyonareaarraypackaging(suchasBGAFlipChip)whichprovidesmeIOssmallersizebetterperfman

2、cesofthechipthanmanystardpackagesisdevelopedrapidly.Meanwhilethepackagingequipmentsaremecomplexthanever.Visionalignmenttechnologyisoneofthekeytechniquesfpackagingequipments.Thestructureofalignmentsystembasedonmachinevisi

3、onthedesignofcomponentsthealgithmofimageprocessingalignmentaresystematicallyinvestigatedinthisdissertation.Aframeofvisionalignmentsystemisfirstlyproposed.Thenitsfunctionalmodulesareanalyzedtheprincipiahowtochooseitscompo

4、nentsaregiven.OpticalsystemthatisthekeymoduleofthealignmentsystemisstudiedwhichconcernsadoptionoftheLEDilluminationwithcoaxialbeamimprovementonflyingcaptureofthechipssubstratesimagesbyCCD.Inthedissertationtheprocessgeome

5、tricfeaturesofareaarraychiparebrieflypresented.Furthermetwomethodsofalignmentsuchasbasedonthechipsurfacepinsbasedonthefiducialmarksareinduced.Comparingbothofthemthemethodofbasedonthefiducialmarksisusedduetoitshighprecisi

6、onrate.Meoverseveralcommonfiducialmarksareanalyzedalignmentsbythemarksaregiven.Theresultofexperimentsshowsthecirclemarkisbetterthanothermarksflocatingthechipofareaarraypackaging.Anewalgithmofsubpixeledgedetectionfcirclem

7、arksissystematicallyproposed.Firstlyrealimagesofthemarksarepreprocessedbymeansofthemethodssuchasimagefilteringthresholdsegmentationedgeextraction.Theprocessingresultitsanalysisaregiven.Indertorealizesubpixellocationusing

8、circlemarkssomealgithmsofsubpixeledgeextractionbasedonpixelrankimagesarediscussedincludedinterpolationfittingmethodsmomentbasededgeoperat.Comparingthesealgithmsanewalgithmofcirclemarkdetectionitsprocedurearegivenwhichisb

9、asedonmomentbasededgeoperatfsubpixeledgeextractionleastsquirefittingfthepositionofcirclemarks.Theexperimentalresultsclearlyshowthatthealgithmcanmeettherequirementoftheareaarraypackagingtechnology.Asoftwaresystemisdevelop

10、edfimageprocessinganalyzinginvisionalignmentofareaarraypackaging.Thesoftwaresystemrealizesthealgithmsmentionedabove.Keywds:areaarraypackagingvisionalignmentsystemimageprocessingimageregistrationfiducialmarkscircledetects