CVD法F摻雜SnO-,2-低輻射薄膜的制備、結(jié)構(gòu)、性能及低輻射鍍膜玻璃的產(chǎn)業(yè)化研究.pdf

1、浙江大學(xué)碩士學(xué)位論文CVD法F摻雜SnO低輻射薄膜的制備、結(jié)構(gòu)、性能及低輻射鍍膜玻璃的產(chǎn)業(yè)化研究姓名：莫建良申請學(xué)位級別：碩士專業(yè)：材料學(xué)指導(dǎo)教師：韓高榮2003.3.1ABSTRACTInthispaperacomprehensiveintroductionofenergysavingcoatingglasses，especiallylowemission(Low—E)coatingglasshasbeengivenincluding

2、thedevelopment，energysavingcharacteristic，iypesandpreparationmethodsitshowsthathighlydopedwideenergygapsemiconductors(egSn02)haspromisingprospectsasthefilmmaterialofeconomicalenergysavingcoatingglassbecauseofitsexcellent

3、opticalpropertylowcostandeasinesstohandleUsingmetallorganicC4H9SnCl3(MBTC)andCF3COOH(TFA)asprecursors，F(xiàn)—dopedtinoxidethinfilmswithgoodopticalandelectricalpropertieshavebeendepositedbyAPCVDmethodinthelaboratoryThefilmsthi

4、cknessisabout286nm，thesheetresistanceis156Q／Dtheelectricalresistivityis44610辛Qcmandthevisibletransmissivityisabout874％晰tlinfraredreflectionabout853％Theinfluenceofthesubstratetemperature，F(xiàn)dopinglevel，contentofactivatormad

5、annealtreatingonthefilms’structure，compositionandpropertieshasbeenstudiedsyntheticallyThefilmspreparedunder425℃iscomposedwithamorphousSn02anditssheetresistanceisveryhighWiththesubstratetemperature’Sincreasing，thedegreeof

6、crystallization，filmthicknessincreaseandelectricalresistivitysheetresistancedecreaseobviouslyWhenthesubstratetemperatureishigherthan525。C，thetemperature’SincreasingiSnotofbenefittothefilmsthicknessandsheetresistanceThedo

7、pinglevelhasastronginfluenceonthefilms’electricalpropertiesWhenthedopinglevelislOWtheresistivitydecreaseswiththedopinglevel’Srisingandwhenthedopinglevelishigh，theresistivityincreaseswiththedopinglevel’SrisingThecontentof

8、activator(H20)hasainfluenceonthedepositionrateoffilmsTheresistivitydecreaseswiththecontent’SincreasinginexperimentsAnnealtreatinghasdifferentinfluenceonthefilms’electricalpropertiesAtlowertreatingtemperature，treatingtime

9、andtreatingatmosphere’Sinfluenceonelectricalpropertiesarenotobvious；athighertreatingtemperature，thesheetresistanceincreaseswiththetreatingtemperaturemadthetreatingtime’SincreasingbecauseofOionandNaion’Spermeatingintothef

10、ilmsBasedontheabovestudysemiindustrialexperimentationonIthehasbeendoneinthefloatglasslineTheexperimentationshowsthattheresultoflaboratorystudyhasSsignificantguidingeffect，andtheproduct’Sperformancereachesdesigningobject，