超高真空CVD外延生長SiGeC材料及性能研究.pdf

1、浙江大學碩士學位論文超高真空CVD外延生長SiGeC材料及性能研究姓名：王亞東申請學位級別：碩士專業(yè)：半導體材料指導教師：葉志鎮(zhèn)2001.4.1王亞東浙江大學碩士學位論文20014h—_————●—●—————’●————_———————__^——_———●—__—__●—_———_—_—●———●————●__——————_————————一一AbstractSilx_vGexCvalloyshaveattractedconsider

2、ableattentionoverthepastyearsduetotheiruniquepropertiesTheincorporationofcarbonintoSiGesystemprovidesalladditionaldegreeforbandgapandstrainengineeringAstimegoeson，moreandmoreresearchefforthasbeenputintoinvestigatingthene

3、wsemiconductormaterials：fromdifferenttechnologiesofgrowingalloy(suchasMBE，RTCVD，SPE)tothemechanismofgrowth；fromtheanalysisofstraincompensationtotheroleofcarbononmodulationofenergygap；fromanalysisofmeritofthematerialstoth

4、edevelopmentofthedevicesTheUltra—highVacuumChemicalVaporDepositionsystemwasfirstlysetupin1992whenprofessorYe—zhizhencamebackfromMITOurgroup，basedontheobjectivesummaryofup—todatesituationofresearchinSilxyGexCyfieldandthea

5、ctualsituationofourlab，hassuccessfullygrownSijxyGexCyalloysonSisubstratebyUHV／CVDInthispaper，afterintroducingthepresentstasisoftheresearchworkaboutSitxyGexCymaterials，IdescribethestructureofourUHV／CVDsystemandthegrowingt

6、echniqueNexttheemphasesareplacedontheanalysisanddiscussionMyresearchworkmainlyfocusesonthefollowingareas：Thestrain0nSilxyGexCyalloysgrownbyUHV／CVDhasbeenstudied，themacroscopicstraininthealloyscanberelievedbyaddingsmallam

7、ountofcarbon，butthelayercontainsstilllargemicroscopicstrain；ThethermalstabilityofSilxyGexCyalloyshasbeeninvestigatedCarbonincorporationchangesthethermalstabilityofSilxGexsignificantlyAthighannealingtemperature，substituti

8、onalcarbongraduallyprecipitatedouttoformcubicsiliconcarbidewhichcanreducethestraincompensation；ThekineticsoftheoxidizedSilxyGexCyalloyshavebeenstudied，theoxidationratedecreasedwiththeincreasingofsubstitutionalcarbon；nler

9、oomtemperaturephotoluminescenceofthermallyoxidizedSilxyQexC。alloyshasalsobeeninvestigated，thePLbandwiththepeakat383nmisattributedtothedefectintheoxidizedfilm，whilethe374mnbandisconsistenttoCinthefilmInshort，ourworklaidaf