ITO靶材熱等靜壓致密化工藝與理論.pdf

1、中南工業(yè)大學(xué)碩士學(xué)位論文ITO靶材熱等靜壓致密化工藝與理論姓名：扈百直申請學(xué)位級別：碩士專業(yè)：材料學(xué)指導(dǎo)教師：張樹高付曉旭2000AbstractSynthesisofITO(IndiumTinOxide)powderswithco”precipitation黼wellasCIPprocessandHIPdensificationofITOceramicswereinvestigatedinthisthcsisTheITOpowders

2、obtainedusingco—precipitationandfollowinghightom“‘perature(10000C)treatmentweredemonstratedtohavetheaverageparticlesizeof13lamnormalparticlesizedistributionandsinglecubicphaseThegreenbodyscompactedat2。0T／cm2withCIPtechni

3、gueweremeasuredtohavetherelativedensityofashighasabout60甄Pro—treatmemforremovalofpartialoxygenfromITOpowdersconductedatthetemperatureofhigherthan1000。CwasprovedhelpfulwithHIPdensfficationofITOceramics：forexample，itcouldr

4、educeHIPtemperaturebyl釃～180℃；singlecubicphasecouldbeeasilyobtained；theamountofoxygende—composedfromtn203andSnOathightemperaturecouldbereduced，““hichwasthoughtofasmaincauseofcracksinITOceramicsInHIPprocessArwasusedaspress

5、uremediacarbonsteelw—＆susedascapsuleandCufoilwaschosedasseperationlayersetbetweencapsuleandcompactedgreenbodyafterthefoilsofPt，NbNi，Cuandstainesssteelwerecompared。ManytechniqueparametersmightaffectthedensificationofITOce

6、ramies，inwhichthemaxiumtemperaturewasmostimportantOptimumHIPparametersWeredeterminedbytests：maxiumtemperatureof1000℃，maxiumpressureof130MPaandkeepingtimeof2～3hTheITOceramictargetob—rainedwiththeseoptimumHIPparametersshow

7、edtherelativedensityof99。$％andtheuniformcomposition，andcouldmeetindustrialrequirmentforfilmsputteringLikemanyotherceramics，theHIPprocessofITOoxideceramicscouldbederidedintothreesegments，eachofwhichwasdescribedwithrelated