薄膜參數(shù)測量優(yōu)化算法及其軟件實現(xiàn).pdf

1、浙江大學信息學院碩士學位論文薄膜參數(shù)測量優(yōu)化算法及其軟件實現(xiàn)姓名：楚棟申請學位級別：碩士專業(yè)：光學工程指導教師：余飛鴻20100105浙江大學碩士學位論文AbstractBasedontheliteratureinformationinthisthesis，thewansmissionspectrummethodfordeterminingtheopticalconstantsandthicknessofthinfilmshasbeen

2、studiedThealgorithmsfordeterminingboththeopticalconstantsandthethicknessofthinfilmsincludingadaptedsimulatedannealingalgorithmandgeneticalgorithmhavebeenstudiedAccordingtothetheoriesofthinfilmcalculationandoptimizationan

3、ewglobaloptimizationmethod—GASAformultilayerfilmthicknesscalculationispresentedinthispaperFirstlyitgeneratesanewgroupoflocaloptimumsthroughgeneticandmutationoperationThenthesolutionsareacceptedatacertainprobabilityandwil

4、lbecalculatedrespectivelyinASAprocessastheinitialsolutionsAthstconjugategradientalgorithmisutilizedtosearchaccuratelyandquicklyThisgeneticsimulatedannealingalgorithmcaneffectivelyenhancetherobustnessofthealgorithmandredu

5、cethelimitationofthesearchingareaAccordingtotheresearchofthealgorithmthereflectanceandtrammissionmetrologysystemisdiscussedinacompletewayThearticlelayoutsoⅡ℃guidingreferencesuchasintrosforsomepervasivecommercialdeviceint

6、heworld，thedatainformmionforthosedevicesandtheliketohe|pchoosetherelatedmetrologydeviceproperlyThroughthisprojectbasedonthereflectanceandtransmissionmetrologysystemwedidsoⅡ℃experimentsTheexperimentalresultsshowthatthepro

7、posedalgorithmcancalculatethethicknessof3hyerand4layerthinfilmwithintherangeoflOnmt05pmandlessthan1％calculationerrorKeyword：MuRih)rerfilmmeasurement；Geneticsimulatedannealingalgorithm；Adaptedsimulatedannealing；Geneticalg