基于eM-Plant的虛擬自動(dòng)組合裝置(Cluster Tool)的實(shí)現(xiàn).pdf

1、廣東工業(yè)大學(xué)碩士學(xué)位論文基于eMPlant的虛擬自動(dòng)組合裝置（ClusterTool）的實(shí)現(xiàn)姓名：李飛申請(qǐng)學(xué)位級(jí)別：碩士專業(yè)：機(jī)械電子工程指導(dǎo)教師：伍乃騏20090501廣東T業(yè)大學(xué)碩士學(xué)位論文AbstractSemiconductorindustryplaysallimportantroleinthenationaleconomyandtechnologyInordertohavebetterquaHtycontrolandteduc

2、ethewaferfabricationleadtime，thereisanincreasinguseofintegratedmanufacturingequipmentsuchasclustertoolsthatintegrateseveralprocessingmodulesfordifferentprocessstepswithtransfermoduleItispredictedthatmorethanthirtynewwafe

3、rfabricationproductlineswillbebuiltinChinainthenexttenyearsHoweveritnotonlylacksselfdevelopedequipmentandprocesstechnologytobuildsuchsystems，itisalsoagreatchallengetowelloperatesuchsystemsMoreoverwhileequipmentandprocess

4、technologyCanbebought丘omforeigncountries，theoperationofthesesystemsshouldbedonebyourselvesThus，researchforhowtooperatethesesystemsshouldbecarriedout，includinghowtoscheduleandcontrolthesesystemsExtensivestudyhavebeendonei

5、ntheoptimizationandcontrolproblemofwaferfabricationwhichisoneofthemostcomplexmanufacturingsystemsUptonowdomesticstudiesmainlyfocusedonthemodelingandschedulingforthewafermanufacturingsystemlessresearchattentionispaidtothe

6、operationofclustertoolsOntheotherhand，someresearchersoutsideofChinahavebeendedicatingtothestudyontheoperationofclustertoolsNevertheless，duetesidencytimeconstraintsandactivitytimevariationofclustertools，theschedulabilitya

7、nalysisandschedulingproblemsofclustertoolsarestillopenWithwaferresidencytimeconstraintsandrevisitinginclustertoolsforsemiconductorfabricationtheschedulingandcontrolproblemofclustertoolsisverycomplexandthefeasibilityofasc

8、heduleandcontrolpolicycannotbecheckedanalyticallyHoweveravirtualclustertoolCanbeservedforthispurposeMotivatedbythis，avirtualclustertoolforcontrollertestingisdevelopedbyusingeMPlantItisaparameterizedandthree—dimensionalmo