定量俄歇電子能譜分析中背散射因子的計算.pdf

1、中國科學(xué)技術(shù)大學(xué)碩士學(xué)位論文定量俄歇電子能譜分析中背散射因子的計算姓名：談文舒申請學(xué)位級別：碩士專業(yè)：凝聚態(tài)物理指導(dǎo)教師：丁澤軍20050501中國科學(xué)技術(shù)大學(xué)碩士學(xué)位論文AbstractUsingaMonteCarlosimulationmethod，wehavesimulatedthegenerationandemissionprocessesofsignalsinAugerElectronSpectroscopy(AES)and，

2、hence，recalculatedthebackscatteringfactorwhichisanimportantparameterinquantitativeAESanalysisThisnewcalculationhascombinedmostoftheadvancesintherelatedfields，iebyadoptingthenewdefinitionofbackscatteringfactor，theup—to—da

3、teMonteCarlomodelofelectroninelasticscatteringbasedonadielectricfunctiontheoryandmoreaccurateionizationCROSSsectionFurthermore，thecalculationresultsbasedonthenewdefinitionhasensuredlessstatisticalerrorTheworkisaimingtopr

4、ovideamoresystematicandaccuratedatabaseofbackscatteringfactorforquantitativeAESanalysisStartingfromsimulationofthetwoelementalprocessesofAugerelectronsignals，ieexcitationofAugerelectronsbyincidentelectronsandbackscatteri

5、ngelectronsandemissionofsignalsfromasurface，wecalculatedthecorrespondingfunctions：excitationdepthdistributionfunction(EXDDF)andtheemissiondepthdistributionfunction(EMDDF)Thishasenablednstoderivethebackscatteringfactorval

6、uesforthestrongestAugersignalpeaksin14elementalmaterialsTherelationsbetweenthebackscatteringfactorvalueandtheprimaryenergy，theangleofincidenceandtheemissionangleofAugerelectronsaresystematicallystudiednleireffectstothepe

7、akintensityinanalysishavebeenanalyzedInthisthesis，wealsogiveadetaileddiscussiononseveralproblemsincludingtherangeofbackscatteringfactorvalue，theeffectivesignaldepth，thecontributionstotheAugerelectronexcitationbyincidente