半導(dǎo)體廠廢水來源及處理介紹

1、Newlvit 04/08/2012,1,Wastewater Treatment System of CISEMI,CISEMI廢水處理系統(tǒng)1期簡介,Newlvit 04/08/2012,2,Content,Waste Water System Waste Codes in China Wastewater Effluent Standard Waste Classification Waste Definition

2、 Wastewater System Flow Waste Chemical Collection Chemical Dosing SystemWaste Tank Material & List Waste Photoresist Lifting station Layout Waste Water Lifting Station Wastewater Treatment Layout,Newlvit 04/0

3、8/2012,3,Waste Codes in China,中華人民共和國水污染防治法 (水) 中華人民共和國國家標(biāo)準(zhǔn) 地面水環(huán)境質(zhì)量標(biāo)準(zhǔn) 中華人民共和國國家標(biāo)準(zhǔn) 地下水環(huán)境質(zhì)量標(biāo)準(zhǔn) 污水綜合排放標(biāo)準(zhǔn)GB 8978-2002之第三級標(biāo)準(zhǔn) 其中氨氮實(shí)行二級標(biāo)準(zhǔn) 污水處理設(shè)施環(huán)境保護(hù)監(jiān)督管理辦法 污水排入城市下水道水質(zhì)標(biāo)準(zhǔn),Newlvit 04/08/2012,4,Waste Codes in Chi

4、na,國家危險廢物名錄HW06有機(jī)溶劑廢物：廢催化劑； 清洗剝離物、反應(yīng)殘?jiān)?及濾 物與載體廢物感光材料廢物：廢顯影液定影液、正負(fù)膠片、相紙及藥品表面處理廢物：廢電鍍?nèi)芤骸㈠儾塾僭?、電鍍水處理污泥、處理酸堿渣、氧化槽渣、磷化渣 HW22含銅廢物HW24含砷廢物HW31含鉛廢物HW32無機(jī)氟化物廢物：氫氟酸…不包括氟化鈣HW3

5、4廢酸：廢硫酸、硝酸、 磷酸… HW35廢堿：NaOH、KOH…HW42廢有機(jī)計溶劑：異丙醇、丙酮、環(huán)戊酮、二甲苯…,Newlvit 04/08/2012,5,Wastewater Effluent Standard,其他水質(zhì)項(xiàng)目亦須符合GB 8978-2002 污水綜合排放標(biāo)準(zhǔn)之第三級標(biāo)準(zhǔn)。,Newlvit 04/08/2012,6,Waste Classification,WastewaterFrom Fab,,,,D

6、r-REC,,Dr-DHF,,General Acid/CausticWastewater,,,Dr-GW,,,Dr-HPM,Dr-APM,,FluorideWastewater,,,Dr-MHF,,Dr-HHF,,,,Dr-CMP-M,,Dr-CMP-O,,AcidWastewater,,,Dr-H2SO4,,Dr-H3PO4,,SolventWastewater,,,,Dr-Sol.,Dr-IPA,,Photo Resis

7、tWastewater,,,Dr-PR-P,,,Dr-FL,Dr-ES,,Dr-H2SO4+HF,Dr-CMP-I,,Dr-L/S,,,Dr-PR-N,,ReclaimWastewater,,CMPWastewater,,Dr-CMP-P,Newlvit 04/08/2012,7,Waste Classification,,,,DI Water Plant,,,Dr-CAREG,,Dr-MGREG,,HVAC,,Chemic

8、alRoom,,,,Dr-C/S,,Dr-CTBW,,Dr-GW,,Dr-MHF,,Dr-H2SO4,,Dr-Sol.,,Dr-HPM,,Dr-H3PO4,To FWW,To GWW,To GWW,To GWW,WastewaterFrom Facility,Newlvit 04/08/2012,8,Drainage Classification For Chemical Room,Newlvit 04/08/2012,9,

9、Drainage Classification For Chemical Room,Newlvit 04/08/2012,10,Waste Definition,Definition of liquid waste in wastewater treatment - 1 Dr-GW, Dr-HPM & Dr-APM (General Waste) Quick Dump Rinse step of chemic

10、al bath drain (APM, HPM, SPM excluding for HF), Others (Including SO4-2, PO4-3 & Organic Solvent), Resistance < 2M?-cm. Dr-FL Floor drain. Dr-ES Emergency shower. Dr-HHF 49%, Fluoride contain

11、 chemical drain. Dr-MHF Less than 49%, Fluoride contain chemical drain. Dr-DHF Quick Dump Rinse Fluoride contain chemical drain. Dr-CMP-M Contain Metal slurry of CMP & wafer scrubber drain. Dr-CMP-O

12、Contain Oxide slurry of CMP & wafer scrubber drain.,Newlvit 04/08/2012,11,Waste Definition,Definition of liquid waste in wastewater treatment - 2 Dr-CMP-P Contain Poly slurry of CMP & wafer scrubber dra

13、in. Dr-CMP-I CMP Idling water drain. Dr-H2SO4 SPM Drain. Dr-H3PO4 H3PO4 Drain. Dr-H2SO4+HF Sulfuric acid + Hydrofluoric acid Drain. Dr-Solvent Organic solvent Drain. Dr-IPA IPA Drain. Dr-ACT-935

14、 ACT 935 Drain. Dr-PRP & Dr-PRN Photo resistance drain.,Newlvit 04/08/2012,12,Waste Definition,Definition of liquid waste in wastewater treatment -3 Dr-L/S Local Scrubber drainage and blow down. Dr-C/S

15、 Central Scrubber drainage and blow down. Dr-CAREG C/A Regeneration water. Dr-MGREG MGR Regeneration water. Dr-CTBW Cooling Tower drainage and blow down.,Newlvit 04/08/2012,13,HF Treatment System Flow,HF

16、 Collection Tank 30 M3,Dr-DHF,,,,DHFLifting Tank20 M3,,Dr-HHF,,HHFLifting Tank20 M3,,Dr-CMP,,CMPCollection Tank10 M3,,,,,,,,,From EMP,From SLCT,From SLFP,From WWSUP,,,,,,,,,,,,,,,,Air Blower,,,,,,,,,,To HFWRT,,,

17、Newlvit 04/08/2012,14,HF Treatment System Flow,,NaOH,,HFWReactionTank210 M3,HFWReactionTank310 M3,HFWReactionTank410 M3,M,,,,To AWCT,,M,,CaCl2,Polymer,PAC,,,,,,M,,,,,M,,HFWReactionTank110 M3,,,,,,H2SO4,,,,,

18、,,,,M,,,To SLCT,To HFWRT,,,,,,From CDA,Newlvit 04/08/2012,15,HF Treatment System Flow,,M,,,,,From CDA,,,,,,,,,,,,,TO HFWCT,Slurry Filterpress,,,,,,From HFWST,,,,,Lorryout,,英文簡寫說明EMP：Emergency Pump SLCT：Slu

19、dge Storage Tank HFWRT：HFW Reaction Tank AWCT：AW Collection TankSLFT：Slurry Filterpress WWSUP：Wastewater Sump PumpHFWST：HFW Sedimentation Tank HFWCT： HFW Collection Tank,To HFWCT,,Newlvit

20、04/08/2012,16,GW Treatment System Flow,AW Collection Tank 100 M3,,,Dr-GM,,AWLifting Tank10 M3,,,,,,,From EMP,From HFWST,From CSUP,,,,,,,,,,,,,,,,Air Blower,,,,,,From ASUP,From MMF/ACF Backwash WW,,,From Reclaim Bypa

21、ss,To AWNT,,,Newlvit 04/08/2012,17,GW Treatment System Flow,NaOH,,,,,,M,,M,,AWNeutrTank123 M3,H2SO4,,,,,,,M,,AWNeutrTank323 M3,,,AWNeutrTank223 M3,,,AWEffluentTank12 M3,,Discharge,,,To EMT,Newlvit 04/08/

22、2012,18,EM System Flow,EmergencyTank 150 M3,AW Collection Tank 100 M3,HF Collection Tank 30 M3,,,,,,,,,AWEffluentTank12 M3,,,,,,,To AWCT,To HFCT,Newlvit 04/08/2012,19,Waste Chemical Collection,Solvent LiftingTan

23、k 5 M3,Dr H2SO4,Dr H3PO4,Dr SOL,,,,,,,,,,,,Lorryout,Newlvit 04/08/2012,20,Waste Photoresist Collection,Dr Waste Phototesist,,,,,,,,Lorryout,Waste Photoresist Lifting Tank 5 M3,Newlvit 04/08/2012,21,Chemical Dosing C

24、ollection,NaOH Tank 20 M3,,,,,,Lorryin,,,,,,,,,To AWNT,To HFWRT,,,,,From AWNT,From HFWRT,H2SO4 Tank 10 M3,,,,,,Lorryin,,,,,,,,,To AWNT,To HFWRT,,,,,From AWNT,From HFWRT,Newlvit 04/08/2012,22,Chemical Dosing Collectio

25、n,GaCl2 Tank 20 M3,,,,,,Lorryin,,,,,,,,To HFWRT,,,,From HFWRT,Newlvit 04/08/2012,23,Chemical Dosing Collection,PAC Tank 5 M3,,,,,,Lorryin,,,,,To HFWRT,,PAM Tank 5 M3,,,To HFWRT,,Manual,Newlvit 04/08/2012,24,P&ID

26、and Water Balance,Newlvit 04/08/2012,25,Waste Segregation,Piping：Classified as possible. System： -- General Waste -- HF -- Sludge Dewater -- Chemical Dosing -- Waste Chemical Collection Dike Area： -- Ac

27、id Waste：H2SO4, H2SO4+ HF, H3PO4, HF -- Caustic Chemical：NaOH -- Acid Chemical：CaCl2, PAC, (Polymer) -- Organic Waste：Solvent, IPA, PR,Newlvit 04/08/2012,26,Wastewater Tank Material,Newlvit 04/08/2012,27,Wastew