噴霧熱解法制備氟摻雜二氧化錫導(dǎo)電薄膜及其性能研究.pdf

1、合肥工業(yè)大學(xué)碩士學(xué)位論文噴霧熱解法制備氟摻雜二氧化錫導(dǎo)電薄膜及其性能研究姓名：張志海申請學(xué)位級別：碩士專業(yè)：材料學(xué)指導(dǎo)教師：吳玉程史成武20100301PreparationandCharacterizationofFluorine—dopedTinDioxideConductiveThinFilmsDepositedbySprayPyrolysisABSTRACTTransparentconductivethinfilmsofF：Sn

2、02(fluorine—dopedtindioxide，F(xiàn)TO)withhighopticaltransmittanceandlowelectricalresistivityarekeyelementsforthin—filmsolarcellsanddisplaydevicesFTOweredepositedonpreheatedmicroscopicglassslidesusingpentahydratestannicchlorid

3、e(SnCl4。5H20)andammoniumfluoride(NH4F)or3ethyl1一methylimidazoliumtrifluoroacetate(EMITA)assourcesfortinandfluorine，ethanol／isopropanolandwaterassolventsbyanintermittentspraypyrolysismethodTheFTOthinfilmswerecharacterized

4、byX—raydiffractometer，scanningelectronmicroscope，ultraviolet—visiblespectrometryandfour—point—probesetupTheeffectsofspraytimes，substratetemperature，concentrationofSnCl4，NH4F／EMITA，H202andvolumeratioofethanol／isopropanolt

5、owaterontheopticalandelectricalcharacteristicsofFTOthinfilmswereinvestigatedTheresultsshowthatthesheetresistanceandtheaveragetransmittanceoftheFTOthinfilmspreparedwiththesolutionwith0glmol／LSACl4，01mol／LNH4F，atavolumerat

6、ioofethanoltowaterof8：2for100timesat500℃are13Q／口and76％，respectivelyTheresultsshowthatthetransmittanceoftheFTOthinfilmscanbeimprovedduetoamoderateconcentrationofH202(一O05tool／L)inthesprayingsolution，andthesheetresistancei

7、SunchangedThesheetresistanceandtheaveragetransmittanceoftheFTOthinfilmspreparedwiththesolutionwith08mol／LSnCl4，O1mol／LNH4FandO05mol／LofH202，atavolumeratioofisopropanoltowaterof8：2for100timesat500℃are15Q／口and84％，respectiv

8、elyTheFTOthinfilmhasuniformgrainsizeandacompactmorphologyTheresultsshowthatthesheetresistanceandtheaveragetransmittanceoftheFTOthinfilmspreparedwiththesolutionwith04mol／LSnCl4，03mol／LEMITA，atavolumeratioofethanoltowatero