外文翻譯--一種低成本智能式電容位置傳感器

1、中文 中文 2742 字A Low-Cost, Smart Capacitive Position SensorAbstractA new high-performance, low-cost, capacitive position-measuring system is described. By using a highly linear oscillator, shielding and a three-signal appro

2、ach, most of the errors are eliminated. The accuracy amounts to 1 μm over a 1 mm range. Since the output of the oscillator can directly be connected to a microcontroller, an A/D converter is not needed.I. INTRODUCTIONThi

3、s paper describes a novel high-performance, low-cost, capacitive displacement measuring system featuring:1 mm measuring range,1 μm accuracy,0.1 s total measuring time.Translated to the capacitive domain, the specificatio

4、ns correspond to:a possible range of 1 pF; only 50 fF of this range is used for the displacement transducer;50 aF absolute capacitance-measuring inaccuracy.Meijer and Schrier [l] and more recently Van Drecht,Meijer, and

5、De Jong [2] have proposed a displacement-measuring system, using a PSD (Position Sensitive Detector) as sensing element. Some disadvantages of using a PSD are the higher costs and the higher power consumption of the PSD

6、and LED (Light-Emitting Diode) as compared to the capacitive sensor elements described in this paper.Ⅱ. THE ELECTRODE STRUCTUREThe basic sensing element consists of two simple electrodes with capacitance Cx, (Fig. 2). Th

7、e smaller one (E2) is surrounded by a guard electrode. Thanks to the use of the guard electrode, the capacitance Cx between the two electrodes is independent of movements (lateral displacements as well as rotations) para

8、llel to the electrode surface.The influence of the parasitic capacitances Cp will be eliminated as will be discussed in Section Ⅲ.According to Heerens [3], the relative deviation in the capacitance Cx between the two ele

9、ctrodes caused by the finite guard electrode size is smaller than:δ<e-π(x/d) (1)where x is the width of the guard and d the distance between the electrodes. This deviation introduces a

10、nonlinearity.Therefore we require that δ is less than 100 ppm.Also the gap between the small electrode and the surrounding guard causes a deviation:δ<e-π(d/s) (2)with s the width of the

11、 gap. This deviation is negligible compared to (l), when the gap width is less than 1/3 of the distance between the electrodes.Another cause of errors originates from a possible finite skew angle α between the two electr

12、odes (Fig. 3). Assuming the following conditions:the potentials on the small electrode and the guard electrode are equal to 0 V,the potential on the large electrode is equal to V volt,the guard electrode is large enough,