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1、Page1SenssActuatsA136(2007)374–384DevelopmentofvariousdesignsoflowpowerMEMSvalvesffluidicapplicationsA.M.CardenasValenciaaJ.DlutowskiabJ.?BumgarneraC.MunozabW.WangaR.PopuriaL.LangebrakeaaCenterfOceantechnologyUniversityo
2、fSouthFlida140SeventhAve.S.StPetersburgFL33701UnitedStatesbDepartmentofElectricalEngineeringUniversityofSouthFlida4202E.FowlerAveTampaFL33620UnitedStatesReceived11July2006receivedinrevisedfm28November2006accepted19Decemb
3、er2006Availableonline22December2006AbstractAutomatedcontrolledfluiddeliveryisanimptantoperationinmicrototalanalysissystems(TAS).Actuatedmicrovalveshavebeenproposedtoseparateapressurizedfluidfromthechanneltobefilled.Thiss
4、chemegreatlyreducedtheenergyrequiredtomovethefluid.Thedesignmicrofabricationperfmanceofarraysofsingleusevalvewhichconstituteanintegralpartofthisactuationmechanismispresented.Theaddressableconstituentofthevalveisathinmeta
5、llicohmicresistwhosedesigndictatestheactuationvoltage.Theresistispatternedonasiliconnitridemembranethatconstitutestheflowbarrierwhichstsonasiliconwafer.Rapidheatingviaanelectricpulseinducesthermalstressesinthemembraneres
6、istwhichinturnbreaksthemembraneopeningthevalves.ThechosenprocessingstepsallowfwaferleveldevicefabricationusingstardMEMSprocessingtools.Differentsizemembraneswithvariousthicknesses(123m)aretested.Valvesthatwithstapressure
7、differentialofupto5bar(3mm3mm3mthicksiliconnitridemembranes)werechosenfthestudy.Investigatedvalveswereactivatedwithapotentialsrangingbetween14140VrequiredactivationenergiesfromtenstohundredsofmilliJoules.?2007ElsevierB.V
8、.Allrightsreserved.Keywds:ThermallyactuatedSingleuseMicrovalves1.IntroductionManywksinliteratureexemplifyfluidicdeliverymechanismsthereferenceshereinareasmallsample[7–14].PneuMicrofluidicshasbeenincludedinvariousanalytic
9、almaticallyinertialllydrivenfluidicdevicesarepreferredoverschemesthatincpatethewellknownadvantagesofmicroelectrokiicmechanismsduetotheircapacitytoprovideascaletransduction.AbasicfluidicoperationimptantinTASwiderrangeoffl
10、owrates[10–14].CDstyledplatfmsbasedLabonachipapplicationsisthecontrolleddeliveryofoncentrifugalfcedactuationareaclassicalexampleofmicrominutefluidamounts.Thepurposesbehindhermeticfluidstfluidicschemes[11].Volumeexpingmat
11、erialsareanotherageitsondemdeliveryevenasasingleuseoperationfabricatemicrovalvesthatrequiredifferentpowerspecifioftheenergyrequiredfactuationtofractionsofaJouleiscationsfacilitatingitspotentialintegrationinptablesenssrep
12、tedinthermallyactivated“burstplug”valvesbyMuellerareshown.etal.[2728].Thedesignproposedherealsobasedonthermallyinducedstressesdiffersfromotherwksinthatthevalveis2.2.Theeticalbackgroundresistdesignsfmedbyamembraneonwhicha
13、thinresistispatterned(Fig.1a).ThisdesignoffersversatilityasthevalvescanbeIfsingleusevalves(anarrayisshowninFig.1)aretobeusedfabricatedwithvariousdimensions(leadingtovalvescapableinastedpneumaticenergyfluidicmechanismtwoi
14、mpofvariousoperatingconditions)ondifferentwafersthantantissuesmustbeconsidered.Ononehamechanicallythosewherethemicrochannelsotherfluidiccomponentsstrongmembranetocontainthepressurizedfluidisdesirable.arelocated.Hosesflui
15、dicptspopularinmicrofluidicsThestrongerthemembranethehigherthepressuredifferenresearchdevelopmenteasilyinterconnectdevicesasshowntialitcanwithstthefastertheliquidfillingoftheinFig.1b.Wellacterizedcommonprocessingstepswer
16、edesiredchannelreservoir.Ontheotherhthemembraneedwiththeaimofachievinghighyields.IfimplementedashastobereliablybrokenwithsmallamountsofenergytheshowninFig.1btheactuationenergyrequirementsaredictatedbreakagetimelagmustbes
17、mall.Inthisreptthemaximumbytheconsumedpowerofthevalvingmechanism.Thiswkpressurethatseveralsizemembranescanwithstisexperreptsonthemicrovalvefabricationempiricallystudiesimentallydetermined.Phenomenologicalmechanicalmodels
18、designsrequiringlowactivationenergies.solvedgenerallyusingnumericaltechniquesarewelldocumentedinliterature[3435].Asimpledeivemodelisused2.Valvesdesigns:practicaltheeticalhereintoquantifythemaximumpressuredifferentialthat
19、theconsiderationsmembranescanwithst.Thedeivemodelisvalidfamembranewithlargeplanardimensionsincomparisonwithits2.1.Ontheionofmaterialsfmicrovalvethickness(whichisthecaseherein)canbeusedtorelatefabricationtherequiredbreaka
20、gepressurethemembranedimensions[36].AfcebalancecanbewrittenwhenthepressuresfacThinresistsdepositedonsiliconnitridehavebeenrealizedingeachfaceofthemembranechangesasanequationofthefvarioussensingapplications(gaspressuretra
21、nsducers)fmFig.1.(a)Schematicillustratingthesiliconmembraneapatternedresistthatconstitutethesingleusevalvesdescribedhere.(b)Conceptualizationontheutilizationofanarrayoftheproposedsingleusevalves.Page3376A.M.CardenasValen
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