AZO(ZnO∶Al)透明導電薄膜的PECVD制備及其光電特性的研究.pdf

1、華中科技大學碩士學位論文AZO（ZnO∶Al）透明導電薄膜的PECVD制備及其光電特性的研究姓名：劉玉萍申請學位級別：碩士專業(yè)：脈沖功率與等離子體指導教師：劉明海胡希偉20070609華中科技大學碩士學位論文IIAbstractSolarenergyisacleanrenewableenergysource，solarcellsbasedonphotovoltaiceffecthavebroadbrightfuture.transpar

2、entconductivefilmtechnologiespalyanimptantroleintheresearchproductionofhighefficiency，lowcostsolarcell.AZO(ZnO:Al)transparentconductivefilmspossessnotonlygoodphotovoltaicpropertieslikeITO(In2O3:Sn)butalsolowerpricesmenon

3、toxicmestableinhydrogenplasmaenvironmentthanITO.ToobtainAZOfilmwithhightransmittanceinvisiblelightarealowresistivitystableperfmancehighqualitygoodadhesiontothesubstratemanyAZOfilmpreparationtechniqueshavebeendevelopedath

4、omeabroadtocontrolimprovethematerialperfmancesuchasmagronsputteringsolgelpulsedlaserdeposition(PLD)vacuumevapationChemicalvapdeposition(CVD)others.InthisthesisAZOpolycrystallinethinfilmswithstrongadhesiontothesubstratelo

5、wsheetresistivityof89?□highvisiblelighttransmittanceof89%havebeenfabricatedbyPECVD(plasmaenhancedchemicalvapdeposition)methodonglasssiliconsubstrate.Mainresearchesfthisthesisareincludedasfollow：(1)Thestructurephotovoltai

6、cpropertiesfabricatestechnologiesapplicationsofAZOfilmareintroduced.(2)ThereactsethasbeendesignedinstalleddebuggedaccdingtotheprincipleofPECVDthephysicochemicalnatureofsourcematerialaboutZn（CH3COO）22H2OAl(OH)(CH3COO)24H2