納米薄膜非平衡熱導(dǎo)率的實驗及理論研究.pdf

1、青島科技大學(xué)碩士學(xué)位論文納米薄膜非平衡熱導(dǎo)率的實驗及理論研究姓名：段占立申請學(xué)位級別：碩士專業(yè)：化工過程機(jī)械指導(dǎo)教師：馬連湘20090418青島科技大學(xué)研究生學(xué)位論文EXPERIMENTALANDTHEORETI(1氣LRESEARCH0NNON—EQUILIBRIUMTHERMALCONDUCTIVITY0FNANOSCAI，ETHINFILMSThinfilmswiththicknessinmicro?！畇caleandnanosc

2、aleareimportantsubassembliesintheapplicationareassuchasintegratedcircuittransinstors，photoelectronicandMEMSdevicesTheperformanceandreliabilityofthedevicesarestronglydependentontheheatconductioninthinfilmsDuetothetinysize

3、ofthethinfilminthethicknessdirection，microstructureandboundaryeffects，thethermalconductivity(TC)ofthinfilmsarequitedifferentfromcorrespondingbulkmaterialsandtheheattransfercharacterizationofthinfilmsmayalsodifferentfromc

4、lassicalmacroscopyNanofilmthermaltransmissionsarcthehotspotsofthecurrentmicroscaleheattransferBasedontheboundaryeffectsandtheassumptionoftransportequationsthatdeviatefromthelargescaleoflocalthermalequilibrium，thepaststud

5、iesabouttheheatconductionofthinfilmmaterialsbasedbalanceconditionsActuallythemeanfreepathofphononinnano—filmstructureislargerthanthesizeoffilms，whichdon。tmeetthebalanceofheatconductionconditionsTherefore，ithasimportantsi

6、gnify7cancetostudynonequilibriumthermalconductivityofnano—filmAtthebasisofoverviewofathomeandabroadresearches，experimentalandtheoreticalmethodisverifiedtoresearchthethermalconductivityofnanothinfilmmeasurementinthispaper

7、A3comeasurementsystemissetupafterastudyoftheexistingmethodsThesystemisverifiedbymeasurementofthePECVDthinfilmwiththickness400nm，whichobtaintheTCiS152(W／mK)inlinewiththeliteraturesThemeasuredTCofSi02madebyPECVDisabout45％m

8、orethanbyLPCVDWiththeincreasingfilmthickness，changehasbecomeincreasinglyWhenthesubstrateandthicknessisthesame，thedifferentdepositionmethodsofformingadifferentthin—filmmicrostructurehasledtothedifferentthermalconductivity