等離子體吸收探針研制.pdf

1、華中科技大學(xué)碩士學(xué)位論文等離子體吸收探針研制姓名：胡鵬申請(qǐng)學(xué)位級(jí)別：碩士專(zhuān)業(yè)：脈沖功率與等離子體指導(dǎo)教師：劉明海20110110華中科技大學(xué)碩士學(xué)位論文華中科技大學(xué)碩士學(xué)位論文IIAbstractlowtemperatureplasmatechnologyachievesincreasinglywideapplicationintheindustry.Asthedevelopingoftheapplicationdiagnosticte

2、chniquesoflowtemperatureplasmahasreceivedmemeattention.There’revariousdiagnosticmethodsoflowtemperatureplasmainwhichsometritonalonesfinstanceLangmuirprobediagnosticmethodhavebeenstillused.Butastheincreasingoftechnologica

3、lrequirementsaccuracyceaselesslysometritionaldiagnosticmethodscan’tobtainexpectanteffectintheindustry.Therefethispapermainlydescribesanewdiagnosticmethod——PlasmaAbsptionProbe.PlasmaAbsptionProbediagnostictechniquedevelop

4、sfrelyingontheprincipleoftheresonantabsptionofsurfacewaves.InthispaperthePlasmaAbsptionProbediagnostictechniqueiselabatedinthreeaspectssuchasdeducingoftheeticalmodelanaloguesimulationputtingexperimentineffect.Inthetheeti

5、calmodeltheperfmingregionofPlasmaAbsptionProbeisdevidedintoseveralpartsaccdingtothestructureofPlasmaAbsptionProbetheindividualelectromagictheyanalysisofthePlasmaAbsptionProbe‘sperfmingregionshasbeendeducedthenthedispersi

6、onrelationsofthesurfacewavearegivedseparately.Throughtheanalysisofthefactsinfluencingtheprobe’sdiagnosisitcanbeconcludedthattheantennaarearesonatisthecriticalpartinsurfacewaveresonacefollowingithasbeenprovedthroughtheana

7、loguesimulationexperiment.Basedontherelationofsurfacewaves’sresonancefrequency:()211dSWpeεωω?=theelectrondensityofplasmahasbeenobtainedthroughaseriesofresonantabsptions’measuring.Thediagnosticmethodhasbeenappliedtoradiof

8、requencydisgeplasma.Theadviceofimprovingthediagnosticdeviceisgivedatlastofthepaperitwouldbereferfthemextphaseofwkondevelopingthisdiagnosticmethod.Keywds:plasmadiagnosticPlasmaAbsptionProbemodelofelectromagictheyelectrond