iso 14644-3 2019 潔凈室和相關(guān)受控環(huán)境-第3部分：測試方法（英文版）

1、© ISO 2019Cleanrooms and associated controlled environments —Part 3: Test methodsSalles propres et environnements maîtrisés apparentés —Partie 3: Méthodes d'essaiINTERNATIONAL STANDARDISO

2、14644-3Second edition 2019-08Reference number ISO 14644-3:2019(E)Copyright International Organization for Standardization Provided by IHS Markit under license with Standards Council of CanadaNot for Resale, 09/15/2019 2

3、0:39:20 MDT No reproduction or networking permitted without license from IHS--`,,``,,`,``,````,`,,````,,`,`,-`-`,,`,,`,`,,`---ISO 14644-3:2019(E)Foreword ..................................................................

4、......................................................................................................................................................................ivIntroduction ......................................

5、............................................................................................................................................................................................v1 Scope ......................

6、...........................................................................................................................................................................................................12 Normative ref

7、erences ......................................................................................................................................................................................13 Terms and definitions ....

8、.................................................................................................................................................................................1 3.1 General terms .....................

9、...................................................................................................................................................................... 13.2 Terms related to airborne particles ...........

10、........................................................................................................................... 33.3 Terms related to air filters and systems ................................................

11、............................................................................ 33.4 Terms related to airflow and other physical states ......................................................................................

12、........... 43.5 Terms related to electrostatic measurement ................................................................................................................ 53.6 Terms related to measuring apparatus an

13、d measuring conditions ..........................................................53.7 Terms related to occupancy states ..................................................................................................

14、....................................... 64 Test procedures ................................................................................................................................................................

15、.....................................6 4.1 Cleanroom tests ...............................................................................................................................................................

16、....................... 64.1.1 General.....................................................................................................................................................................................

17、. 64.1.2 Supporting tests ............................................................................................................................................................... 74.2 Principle ................

18、........................................................................................................................................................................................ 74.2.1 Air pressure difference tes

19、t .................................................................................................................................... 74.2.2 Airflow test ................................................................

20、........................................................................................................... 74.2.3 Airflow direction test and visualization ...............................................................

21、.......................................84.2.4 Recovery test ...............................................................................................................................................................

22、........ 84.2.5 Temperature test ............................................................................................................................................................. 84.2.6 Humidity test ......

23、................................................................................................................................................................ 84.2.7 Installed filter system leakage tests .............

24、................................................................................................... 84.2.8 Containment leak test .........................................................................................

25、.........................................................84.2.9 Electrostatic and ion generator tests ............................................................................................................. 84.2.10

26、 Particle deposition test ...............................................................................................................................................84.2.11 Segregation test .........................

27、....................................................................................................................................... 95 Test reports ...................................................................

28、.............................................................................................................................................9Annex A (informative) Choice of supporting tests and checklist ...............

29、..........................................................................10Annex B (informative) Supporting test methods ..................................................................................................

30、................................14Annex C (informative) Test apparatus .....................................................................................................................................................

31、........44Bibliography .....................................................................................................................................................................................................

32、........................52© ISO 2019 – All rights reserved iiiContents PageCopyright International Organization for Standardization Provided by IHS Markit under license with Standards Council of CanadaNot for Res