擴散爐軟件使用說明

1、青島賽瑞達設(shè)備制造有限公司1目錄目錄擴散爐軟件使用說明......................................................................................................................................11啟動.......................................................

2、...............................................................................................11.1啟動.......................................................................................................................

3、...................12.進程管理............................................................................................................................................12.1溫度實時顯示............................................

4、..............................................................................32.2運行信息..................................................................................................................................32.3

5、報警顯示功能..........................................................................................................................42.4閥門及流量控制功能...............................................................................

6、...............................52.5推拉舟(機械手)及爐門狀態(tài)顯示..........................................................................................62.6調(diào)試窗口........................................................................

7、..........................................................62.7工藝控制..................................................................................................................................73.工藝管理.................

8、...........................................................................................................................93.1窗口介紹.........................................................................................

9、.........................................93.2工具欄介紹............................................................................................................................103.4工藝（RECIPE）編寫步驟...........................

10、.........................................................................114工藝表.............................................................................................................................................

11、.194.1控制溫度表.............................................................................................................................194.2Profiles修正表....................................................................

12、...............................................204.3工藝信息表............................................................................................................................215.實時曲線...............................

13、...........................................................................................................225.1曲線查看........................................................................................................

14、........................225.2工具欄....................................................................................................................................236歷史記錄.................................................

15、.......................................................................................246.1查詢歷史數(shù)據(jù)........................................................................................................................24

16、6.2數(shù)據(jù)操作................................................................................................................................257事件日志..............................................................................

17、............................................................257.1基本操作................................................................................................................................258.用戶管理...............

18、.............................................................................................................................268.1添加和刪除用戶...................................................................................

19、..................................268.2修改用戶權(quán)限.........................................................................................................................279串口配置...............................................

20、.............................................................................................289.1串口........................................................................................................................

21、................2810擴散爐參數(shù)配置..............................................................................................................................2910.1舟位調(diào)整.........................................................

22、.....................................................................2910.2流量計..................................................................................................................................3010.3報警參數(shù)設(shè)定

23、......................................................................................................................3110.4爐管名稱修改..........................................................................................

24、............................3210.5風(fēng)壓補償控制......................................................................................................................3211窗口排列......................................................

25、....................................................................................3312軟件注冊................................................................................................................................