全自動(dòng)石英晶片分類機(jī)回轉(zhuǎn)臺(tái)動(dòng)態(tài)傾角測(cè)試系統(tǒng)的研制.pdf

1、東北大學(xué)碩士學(xué)位論文全自動(dòng)石英晶片分類機(jī)回轉(zhuǎn)臺(tái)動(dòng)態(tài)傾角測(cè)試系統(tǒng)的研制姓名：于勇申請(qǐng)學(xué)位級(jí)別：碩士專業(yè)：機(jī)械電子工程指導(dǎo)教師：張鐳20070101東北大學(xué)碩士學(xué)位論文AbstraetTheResearchandDesignofDynamicDriftAngleMeasureSystemofTurningPlatformofFull—automaticSortingMachineofQuartzWaferAbstractQuartzwafe

2、rispopularusedinmanyfieldsofmanyelectronicsapplicationsForexample，allsituationsforusingMCUneedquartzwafertokeepsystematnormalfrequencyIfthecutanglesofquartzwaferisverynicetythenthesystemwillworkalnormalfrequencySothemeas

3、ureofthecutanglesofquartz、】I婦isgreatlyimportantTraditionalanglemeasllremachinebyXrayisunabletomeasureroundquartzwaferfortheroundquartzwafercannotearmarkitsXaxisItisfull—automaticsortingmachineofquartzwaferbyX—myofEFGofGe

4、rmanthatcallmeasurethecutanglesofquartzwaferofrandomshapesThekeycomponentofthismachineisahi【ghprecisionturningplatformThehighprecisionturningplatformnotonlyCanlongstabilework，butalsoitsdriftanglemustundersecondItisunreal

5、istictoputallhopeonmechanicalprecisionoflli曲precisionturningplatformAndthathaveagreatcostFormeetingofneedofdynamicprecisionofturningplatformdynamicmeasuringinstantaneousdriftangleerroristhemostavailablemethod，andcompensa

6、tedynamicprecisionofturningplatformIfadoptcontactingmeasljre，thenthemeorewilldisturbtheprocessofturningplatformanditmayscullsurfaceofthetumingplatformThistaskdevelopauntouehdynamicdriftangleme鶴uresystemofturningplatformb

7、asedoIllaserCCDtechnologyforcooperatingtheneedofdevelopingfullautomaticsortingmachineofquartzwaferbyXrayinhomelandThedynamicdriftanglemeasuresystemCancompensatethemeasoreresultofcutanglesofquartzwafer，therebyCallnicetyme

8、asurecutanglesofquartz、vafbrCCDisaimagesensorIthasmanycharacteristicsinineeptingandrecordingofimageinformationAndithasmanymerits，forexamplesmallvolume，smallconsume，hilghdistinguishabilityandhighdelicacyeteSoitisbroadlyap

9、pliedinthefieldofhighprecisionnleasurcLaserCCDmeasuretechnologyisthemainandimportantmethodinthefieldofmodernmeasuretechnologyIthasmanycharacteristicsasuntouchmeasllre，highdelicacy，highefficiencyereItisoneofthemostadvance

10、measoretechnologiesThispaperhasthreemainparts：thedesignofprojectofmeasuresystemthecollectionanddisposalofdatatheameliorationofhi【ghprecisionturningplatformInthepartofthedesignofprojectofmeasuresystemafteranalyzedthechara