薄膜初期成核及表面形貌的蒙特卡羅模擬.pdf

1、東北大學(xué)碩士學(xué)位論文薄膜初期成核及表面形貌的蒙特卡羅模擬姓名：王志秀申請(qǐng)學(xué)位級(jí)別：碩士專業(yè)：流體機(jī)械及工程指導(dǎo)教師：張以忱20060101東北大學(xué)碩士學(xué)位論文AbstractMonteCarloSimulationofEarlyNucleationandSurfaceMorphologyofThinFilmAbstractThethinfilmtechnologyisplayingaveryimportantroleinthemodem

2、hightechfield，andthedevelopmentofanumberofnewmaterialsandapparatusisonthebaseofthinfilmfabricationButbecauseofcomplicatedgrowingprocessofthinfilm，therearesomedifficultiestostudythinfilmgrowthwithexperimentalmethodsandthe

3、oreticalanalysesAsaresult，computersimulationtechniquesweredevelopedtostudythemicrogrowthofthethinfilmAfterabriefdescriptionoffilmgrowthmechanismandrelevantcomputersimulationtechniques，anewthreedimensionalmodelforthinfilm

4、growthispresented，andaMonteCarlosimulationbasedonthismodelinvestigatestheearlynucleationandsurfacemorphologyofthinfilmgrowthThesimulationparameters，suchasinitialenergyofparticles，depositionrateandsubstratetemperaturearec

5、hangedtostudytheireffectsontheresultsofthesimulationInadditionsomeofthesimulationresultsareverifiedbyexperiments，nrstly’themodelisexaminedfromtwoaspects，oneistheuniformityofrandomnumbers，andtheotheristhemaineventshappeni

6、ngindepositingprocessInthesimuIation，theeffectsofchanginginitialenergyofparticles，depositionrateandtemperatureonfihngrowtharerevealedbycalculatingislandnumbersandaverageparticlesofislandsandanalyzingsurfacemorphologyTemp

7、eratureisfoundtohavefunctiononsurfacemorphologybycalculatingmotmeansquareroughnessSomeofthesimulationresultsareverifiedbyexperiments，andexperimentalparametersaredescribedinordertointerpretexperimentalobservationsforcompa