小體積氣流式角速度陀螺的初步研究.pdf

1、北京機(jī)械工業(yè)學(xué)院碩士學(xué)位論文小體積氣流式角速度陀螺的初步研究姓名：王義申請學(xué)位級別：碩士專業(yè)：微電子學(xué)與固體電子學(xué)指導(dǎo)教師：樸林華20071201AbstractABSTRACTTheprincipleofmicroairflowangularrategyroscopeisusedtomeasuretheanglevelocitybythedeflexionofcycleairflow，whichiscausedbyCoriolis’f

2、orceandiSactedinthehotwiresItisasolid—stateinertiadevicewiththefunctionofgyroscopewhilewithoutthewheelpartoftraditionalgyroscopeortheappendsystemofpiezoelectricgyroscopeTheoperationalprincipleofmicroairflowangularrategyr

3、oscopeanditsstructuralconfirmationaleanalyzedinthepaperAsthecoredetectingelementofthegyroscope，themeasureprinciple，theselectivemethodandthecheckcircuitofhotwiresarealsoanalyzedTheoscillationequationandthefiniteelementmod

4、elsofpiezoelectricpumpelementisalsoanalyzed，theresonancemode，theresonancefrequencyandthedisplacementofthepumpalecalculatedbyfiniteelementmethodandthedisplacementcurveisfittedasacubicpolynomialequationThedeformationofthep

5、iezoelectricpumpiscalculatedbycalculatingthevolumeoftherotatorwhichisformedbythefittingcursecausingrotationaboutzaxis’Thejetcurrentcharacterintherotationalcavityisexplainedbycalculatingthevectordiagramandequivalencenepho

6、gramofthevelocityofairflowwhenitisindifferentanglevelocities，instaticincludedThedistributingofairflowvelocitiesinairtightpumpunderdifferentanglevelocitiesiscomputedbyapplicationoftheprogramANSYS—FLOTRANCFDItispostedthatt

7、hesensitivemechanismofmicroairflowangularrategyroscopeandtheeffectsinfluencedbythenaturalconvectionandenvironmenttemperatureAtlast，thecheckingcircuitsaledesignedwhichisusedtoanalyzethecharacterofthecircuitsbyusingthesoft