磁驅(qū)動微執(zhí)行器的模擬與CAD研究.pdf

1、東南大學(xué)碩士學(xué)位論文磁驅(qū)動微執(zhí)行器的模擬與CAD研究姓名：朱珂申請學(xué)位級別：碩士專業(yè)：微電子學(xué)與固體電子學(xué)指導(dǎo)教師：黃慶安2001.3.1摘攔ABSTRACTThemodelingandsimulationofMEMS(Micro—Electro—MechanicalSystem)devjce一一amagneticmicroactuatorwithamultilevelmeandermagneticcorearediscussedint

2、hisdissertationMEMSisthoughttobeapromisingareainmicroelectronjcsHowever，microactuatorshavebeenstudiedmuchlessthanmicrosensorsAfterhavingcomparedseveralkindsofmagneticdrivenactuators，amagneticmicroactuatorwithamultilevelm

3、eandermagneticcoreisthoroughlyanalyzedFirst，amacromodelforthemagneticmicrOactuatOrisproposedbasedonthemagneticcircuitprincipleandequivalentline—chargemethodBecausethismacromodeltakesthefringingeffectintoaccount，theresult

4、ofthismacromodelismoreprecisethanthemodelbaseonenergy，butitismorecomplexOntheotherhand，intheMEMSCADsystem，accurateresultsofeveryessentialdeviceareusuallyrequiredThemorepreciseandrationalanalysisresultshavetobeobtainedSot

5、heaccuratenumericalmodelofeveryessentialdeviceisalsoneededSo。amacromodeIfortheactuatorisdevelopedThus，finiteelementanalysismethodinelectromagnetismcafcufationfsintroducedThenwebuildandanalyzethemacromodelWecomparesimulat

6、ionresultofthismodelwiththatofexperimentalfindingsandANSYSanalysis，andthenumericalresultismuchclosertotheexperimentsInthefinalpart，somecomputerprogrammingdetailsarepresentedThestructureofprogramming、thearchitectureofMEMS