全內(nèi)反射光開關(guān)列陣與多模光干涉器的集成化研究.pdf

1、浙江大學(xué)博士學(xué)位論文全內(nèi)反射光開關(guān)列陣與多模光干涉器的集成化研究姓名：尹銳申請(qǐng)學(xué)位級(jí)別：博士專業(yè)：微電子與固體電子學(xué)指導(dǎo)教師：王明華2001.5.2摘要ABSTRACTTheintegrationofphotonicdevicebecomesmoreandmoreimportantduetothefastdevelopingopticalnetworkInthisdissertation，westudytheintegrationpro

2、pertiesoftwoimportantphotonicdevices：opticalswitcharrayfthekeycomponentofopticalnetwork)andmultimodeinterference(MMI)coupler(itcanrealizemanyfunctionsinopticalsignalprocessing)Onepurposeofthisstudyistoenhancetheintegrati

3、onabilityofopticalswitcharray，whichcanberealizedbyincreasingtheextinctionratiooftheswitchunitandoptimizethearraystructureTheotherpurposeistoimprovethecompatibilitybetweenMMIcouplerandmostwaveguidedevicesThiscanberealized

4、byadoptingnewinterferencestructureCurrent—injectiontotal—internal—reflectionfTIRlisappliedtotheswitchduetoitsnon—polarizationdependentandhigh—speedpropertyConsideringbandfilling，bandgapshrinkageandfree—carrierabsorption，

5、thecarrier—inducedindexchangeofGaAsisanalyzedbetween08um～161amTheasymmetricalY—branchisoptimizedandtheextinctionratioisincreasedmorethan10dBⅥ，ebringforwardperpendicularopticalswitchwhichhasstrongintegrgtfionpotentialThed

6、istancebetweenadjacentwaveguidecallbeassmallas2509mTheextinctionratioof25dBandcrosstalkof45dBisobtainedinsucha4x4arrayConventionalMM【couplerisnormallyfabricatedondeeplyetchedhigh—index—contrastwaveguidestructure，whilemos

7、totherwaveguidedevicesareweak—confinedorgradual—bulge—edgestructuresSothestudyonMMIcoupleristhecombinationofMMIandweak—confinedwaveguideorMMIcouplerandgradual—bulge—edgewaveguideThepropagation—constant—error1udgementmeth

8、odisbroughtoutforthefirsttimetoanalyzethosemodesintheMMIregionResultsshowthatselfimagingcanbeimprovedbytheintroducingofweak—confinedorgradualbulge—edgeWaveguideThismeanswiththeenhancedcompatibilityofMMIcouplertheperforma

9、ncecanbeimprovedatthesalTletime1Furtherstudyshowsthatweak—confinedMMIcouplerreachthebestperformanceundercertainindexcontrastAnequationtosolvethisoptimalindexcontrastisgainedbydecreasethepropagationconstanterrorsofhigh—or