太陽電池用α-SiCx-H薄膜的穩(wěn)定性研究.pdf

1、浙江理工大學(xué)碩士學(xué)位論文太陽電池用αSiCx:H薄膜的穩(wěn)定性研究姓名：?jiǎn)柮髁辽暾?qǐng)學(xué)位級(jí)別：碩士專業(yè)：材料物理與化學(xué)指導(dǎo)教師：席珍強(qiáng)20110321浙江理工大學(xué)碩士學(xué)位論文ResearchonStabiIi夠PropertiesofAmorphousSiIiconCarbideFilms如1SolarCellsAbstlae重冀i曲e爆eie嫩y雒dloweo敷c搿曦dli勰silie濰sol越eollsa聰Ve拶竦∞內(nèi)瞪量醅像elarg

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5、fewe陀Systematicallys沁died弧地舡SiCx：Hminfilmswere鋤ealedatdi脆rcnttempe咖resfordi媧rcntdur翟tionsbyrapid骶rmalprocessi鶘《RT聊alldc鰳Ven垃onal缸1aceprocess主ng(CFP)toanaly鷸me黼ueneeof赫醢te]lnperacIlre鋤le越ingontlles勺mctural，opticalandp嬲siV

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7、ertiesofa—SiCx：m主n矗Ims1rime觚dtemperatureoft11ethe咖alprocessingh硒hugeefI’ectont11epropertiedof靜SiCx：Ht量lin蓮lmsAsme醐盼ea薹ingtemperatureincreaSing，t1把也icknessof￡l掄min矗lmsdecreased，托dfilmsbec鋤emorecompact。There觸lctiveindexofm

8、e也infilmshasrarech鋤ges髓erlowtemperaturea11nealing，鋤dincreasedsha巾Iya船rhi鱒tempera瓴玳鋤neal灑gTheth遮filmscanget∞mpact試ashorttimeThe髓nealinghaslittleinfluenceontllerefiec矗Vi略oftheminfilmThepassiVatiOne旋ctOf饉一SiCx：Hincreasedwi也