用于半導(dǎo)體激光器陣列準(zhǔn)直的微透鏡設(shè)計與工藝研究.pdf

1、華中科技大學(xué)碩士學(xué)位論文用于半導(dǎo)體激光器陣列準(zhǔn)直的微透鏡設(shè)計與工藝研究姓名：周宏申請學(xué)位級別：碩士專業(yè)：物理電子學(xué)指導(dǎo)教師：易新建20050421IIABSTRACTDiodelasershavevariousapplicationsinthefieldofphotonics.Incomparisonwithsolidstategaslaserstheadvantagesofdiodelasersaretheirsmalldimensi

2、onslowcosthighoutputtoinputconversionefficiencywhereasamongdrawbacksofdiodelasersbelonganellipticityastigmatismastrongdivergencyofanoutgoingbeam.Inrecentyearhighpowerapplicationsfsemiconductlaserhavebeenofgrowinginterest

3、.Opticalpowerdensitytotalpowerareimptantparametersflasersystemsinapplicationsinvolvingcouplingoflightintoopticalfiberspumpingsolidstatelasersincludingfiberlasersprocessingmaterialsmedicalprocedures.Efficientcollimationof

4、suchapartiallycoherentlinearlyextendedlightsourcewithlargedivergenceanglesisanontrivialproblemdifficulttoachievewithconventionaloptics.Wedesignedfabricatedacterizedamicroopticaldevicewithdiffractiverefractiveopticaleleme

5、nts.Themaincontentsofthispaperarepresentedas:(1)Introducetheacteristicofsemiconductlaserdiodethetraditionalwaytocollimateit.Thedifficultthemethodtoresolveitbymicrolensispresented.(2)Thematrixopticsbaseongeometryopticsbin

6、aryopticsbaseondiffractivetheyareresearchedtodesignthemicrolens.(3)Acollimatingsystemwithtwoonealignedmicrolenselementsisdesigned.Theparametersofthemicrolensarewkedoutbaseonthematrixopticsbinaryoptics.(4)Fabricationtechn

7、iquesofmicrolensespeciallybasedonSF6O2CHF3reactiveionetchingaredeveloped.Etchingratesivityofsiliconareinvestigatedbyusingexperimentaldesignstasticalanalysisoptimalparamtersareobtained.(5)Convexrefractivemicrolensarraysar

8、esuccessfullyfabricatedbythemethodcomposedofheatfmingphotesistRIEonBCBmaterialstheexperimentalfabricationparametersareobtained.Thepointspreadfunction(PSF)ofthearrayistesttheresultofcollimationismeasured.Keywrods:microlen