高陡度光學(xué)非球面自動(dòng)成形的研究.pdf

1、浙江大學(xué)博士學(xué)位論文高陡度光學(xué)非球面自動(dòng)成形的研究姓名：鄭為民申請學(xué)位級別：博士專業(yè)：測試計(jì)量技術(shù)及儀器指導(dǎo)教師：楊國光曹天寧19980901ABSTRACTABSTRACTAutosurfacingofhighgradientasphericsisanadvancedtechnologywithgreatpracticalandeconomicvalueInordertofabricatethesampleofhighgradient

2、fcICUSlens，sponsoredbythestate863HighTechnologyResearch&DevelopmentProject，wehavemadescientificresearchesontheComputerControlledOpticalSurfacing(CCOS)andhaveachieyedthesatisfiedresultsThedissertationconsistsofthefollowin

3、gparts：(1)Thetheory，thebackgroundandthedevelopmentofCCOSarestudied(2)AnexperimentalCCOSsystemnamedZDCCOShasbeendeveloped，whichiSabletofabricateallkindsofasphericsandotherspheres，ptanesOroffaxisopticalsurfacesZDCCOSiScomp

4、osedofadoubleturntablepolisherthathas5degreesoffreedom，adual—rotationgrindingorpolishingtool，aCNCsystemincludinghardwareandsoftwareadigitalwavefrontinterferometerZDCCOSiSthefirstChinesemultifunction5axispolisher(3)Thepos

5、tprocessingmethodofthepolisheriSdescribedAnewremovalfunctionmodelofthesmalltooIjScreatedanditiSverifiedbytheexperimentsBasedonthetemplatefunctionmodel，thetrackprogrammingalgorithmisdevelopedtomakethetoolstOmoveonspatialc

6、oncentriccirclesduringthefabricationprocessesTheresultsofthecomputersimulationofthegrindingprocessareofreredWealsostudiedthemethodsofunevenpolishing(4)Throughoptimalprogramming，wehavemadethenovelflexiblegrindingpadandpol

7、ishingpadandhaveachievedtheoptimaltechnologicalparametersfromexperments(5)Thispaperpresents3methodsformeasuringthefigureerrorsoftheasphericsduringgrindingandpolishingprocessesTheAsphericsCharacteristicInterferogramcanbeu

8、sedtOcheckthefigureofasphericswithsmallormediumasphericdegrees，ortheasphedcswithbigasphericdegreesonaninffaredinterferometerdirectlyTheselfcollimationInterferometrycanmeasurethefigureerrorsofthepiano—convexfocuslenseasil

9、yAnewmechanicalscanninggaugeisdevelopednladetomeasuretheformsofthegroundsurfaqesinsitu(6)AfoCUSlenssamplewith461JmasphericdegreeIlasbeenfabricatedThorough875hours’gdnding，theformerroris449m，andafterpolishingthefigureeFFO

10、Fisaboutl2L(RMSk=063281tm)ThefabricatiouefficiencyiShighThistaskiSacomprehensiveproiect，whichcoverstheknowledgeofopticaltechnology，opticalmeasurement，computerizednumericalcontrol，mechanism，optimzationItisappraisedastheex