BNT基無鉛壓電薄膜的制備與性能研究.pdf

1、分類號。UDC密級公最。Z毋廬夕乎碩士研究生學位論文BNT基無鉛壓電薄膜的制備與性能研究申請人：學號：培養(yǎng)單位：學科專業(yè)：研究方向：指導教師：完成日期：趙洋2111265電子工程學院微電子學與固體電子學功能材料與器件竇雁巍副教授2014年3月28日AbstractAbstractPiezoelectricmaterialsisnowwidelyusedinthedailylife，theapplicationoftraditionalp

2、iezoelectricmaterialbyusingPb(Ti，Zr)03basedmaterials，buttheleadpiezoelectricmaterialswillpollutetheenvironmentseriouslyAtpresent，peopleareattachingincreasingimportancetoprotectenvironmentalthereisanurgentneedforanewtypeo

3、fenvironmentallyfriendlymaterialstoreplacePb(Ti，z003Inalotoflead—freepiezoelectricmaterials，sodiumbismuthtitanate(Bi0sNa0sTi03)withitsexcellentperformance，becomingtheleadfreepiezoelectricmaterialswithgreatpotentialandare

4、mostlikelytoreplaceleadzirconatetitanateWhensodiumbismuth03NT)atroomtemperaturetrigonalsystem，itsCurietemperatureof320“C，withgoodpiezoelectricproperties，ferroelectricproperties，acousticpropertiesanddielectricpropertiesBu

5、tthedrawbackofBNTmaterialisitshighcoercivefield，theleakagecurrentistoolarge，thesedrawbackslimititsfurtherdevelopmentInrecentyears，thestudymaterialpreparationprocessconditionsandwasmodifiedtoimprovematerialpropertiesofmat

6、erialsThispaperalsoalongthewaythespecificcontentsareasfollows：Thispapermainlyintroducesthedevelopmentsituationofpiezoelectricmaterialdevelopmenthistoryandlead—freepiezoelectricmaterial，explainstheperformanceparametersofe

7、achofthepiezoelectricmaterial，andthetopicselectedtopicbasisNext，thefilmalsointroducesthecharacterizationofseveralcommonmethodsandthepreparationofthisarticleneedtousethefilmequipmentWefocusonthepreparationofBNTfilmsdiscus

8、sedprecursorsolutionconcentration，filmthicknessandannealingtemperatureonthemicrostructureandpropertiesofthinfilms，theanalsisoftheexternalconditionsonthehysteresislooptestresultsimpactAftertheabovetestanalysisconcludedtha